共 35 条
[1]
Afif O., 2014, IEEE COMMUN MAG, V26
[2]
Arun AMG., 2015, J ELECT ELECT ENG AM, V3, P22
[4]
Bhugra H., 2017, PIEZOELECTRIC MEMS R, P99
[7]
Emad A, 2019, PROC IEEE MICR ELECT, P282, DOI [10.1109/MEMSYS.2019.8870894, 10.1109/memsys.2019.8870894]
[9]
Gorisse Marie, 2018, 2018 IEEE International Ultrasonics Symposium (IUS), DOI 10.1109/ULTSYM.2018.8579660
[10]
ION-IMPLANTATION INTO LINBO3
[J].
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH,
1983, 209 (MAY)
:1079-1088