A high-speed image, processing. lids been created. Distributed, computing is used, to get the necessary resources. Controlling a hiah-resolution microscope, the image processing systemgrabs thousands of single images from different XYZ-positions. The system can get all available optical information from a greater microscopical structure like a compete. chip on a wafer. Image pre-processing functions are used to eliminate optical effects like shading. A digital contrast enhancement is also available to get, a better image quality. The scanning process can take several hour's if a high-aperture objective lens is used. At the end we have a complex cluster image structured and after the image post-processing the creation of the mosaic image can be started. The post-processing functions reduce the three-dimensional data to two-dimensional data. Best focus images can be. defined or, extended depth of focus [EDoF] images can be created. XY-neighboring images have overlapped areas. 16 two runs (X- and Y-run) a correlation function define offset values. In a XY-run all available offset values define the final offset, values. The result can be checked and manual changes are possible before writing the final mosaic image file.
