A Tunable Strain Sensor Using Nanogranular Metals

被引：103

作者：

Schwalb, Christian H. ^{[1
,2
]}

Grimm, Christina ^{[1
]}

Baranowski, Markus ^{[1
]}

Sachser, Roland ^{[1
]}

Porrati, Fabrizio ^{[1
]}

Reith, Heiko ^{[3
]}

Das, Pintu ^{[1
]}

Mueller, Jens ^{[1
]}

Voelklein, Friedemann ^{[3
]}

Kaya, Alexander ^{[2
]}

Huth, Michael ^{[1
]}

机构：

[1] Goethe Univ Frankfurt, Inst Phys, D-60438 Frankfurt, Germany

[2] Nanoscale Syst GmbH, D-64293 Darmstadt, Germany

[3] RheinMain Univ Appl Sci, D-65428 Russelsheim, Germany

来源：

SENSORS | 2010年 / 10卷 / 11期

关键词：

cantilevers; electron beam induced deposition; granular metals; strain sensors; BEAM-INDUCED DEPOSITION; 1/F NOISE; CARBON; SPECTRA;

D O I：

10.3390/s101109847

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals. The strain-sensor elements are prepared by the maskless lithography technique of focused electron-beam-induced deposition (FEBID) employing the precursor trimethylmethylcyclopentadienyl platinum [MeCpPt(Me)(3)]. We use a cantilever-based deflection technique to determine the sensitivity (gauge factor) of the sensor element. We find that its sensitivity depends on the electrical conductivity and can be continuously tuned, either by the thickness of the deposit or by electron-beam irradiation leading to a distinct maximum in the sensitivity. This maximum finds a theoretical rationale in recent advances in the understanding of electronic charge transport in nano-granular metals.

引用

页码：9847 / 9856

页数：10

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