Liquid sensor probe using reflecting SH-SAW delay line

被引：9

作者：

Nomura, T ^{[1
]}

Saitoh, A ^{[1
]}

Miyazaki, T ^{[1
]}

机构：

[1] Shibaura Inst Technol, Fac Engn, Minato Ku, Tokyo 1088548, Japan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 91卷 / 1-3期

关键词：

SAW sensor; surface acoustic wave; SH-SAW; reflecting SAW delay line; multi-channel sensor;

D O I：

10.1016/S0925-4005(03)00103-5

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A new liquid sensor probe has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36degrees YX LiTaO3 and the right angle edge of the substrate has been used to reflect the SAW. Multi-channel reflecting SAW delay lines were constructed on the substrate. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in liquid phase. A sensing system configuration is also suggested for the effective operation of the sensor probe. An electronic circuits system for accurately measuring the phase characteristics of the reflected wave and for detecting the output from the multi-channel SAW sensor probe was shown. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：298 / 302

页数：5

共 8 条

[1]

Ballantine D.S., 1997, ACOUSTIC WAVE SENSOR

[2] Transversely coupled resonator filters utilizing reflection of Bleustein-Gulyaev-Shimizu wave at free edges of substrate [J].

Kadota, M ;

Ago, J ;

Horiuchi, H ;

Morii, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2000, 39 (5B) :3045-3048

[3]

NAKAMURA K, 1977, P 1977 IEEE ULTR S, P37

[4] Liquid sensor probe using complete reflection at free edge of shear horizontal mode surface acoustic wave [J].

Nomura, T ;

Saitoh, A ;

Miyazaki, T .

PROCEEDINGS OF THE 2001 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION, 2001, :482-488

[5] Measurement of acoustic properties of liquid using liquid flow SH-SAW sensor system [J].

Nomura, T ;

Saitoh, A ;

Horikoshi, Y .

SENSORS AND ACTUATORS B-CHEMICAL, 2001, 76 (1-3) :69-73

[6]

Nomura T, 1999, ULTRASON, P477, DOI 10.1109/ULTSYM.1999.849443

[7]

SHIOKAWA S, 1991, T IEEJ C, V111, P357

[8]

WHITE RM, 1985, P IEEE ULTR S SAN FR, P490

← 1 →