Systematic design of high-Q prestressed micro membrane resonators

被引：14
作者：
Gao, Wenjun [1 ]
Wang, Fengwen [2 ]
Sigmund, Ole [2 ]
机构：
[1] Tongji Univ, State Key Lab Disaster Reduct Civil Engn, Shanghai 200092, Peoples R China
[2] Tech Univ Denmark, Dept Mech Engn, Solid Mech, DK-2800 Lyngby, Denmark
来源：
COMPUTER METHODS IN APPLIED MECHANICS AND ENGINEERING | 2020年 / 361卷 / 361期
关键词：
Topology optimization; Prestressed membranes; Resonators; Quality factor; Frequency-quality factor; TOPOLOGY OPTIMIZATION; INTERPOLATION SCHEME; QUALITY FACTOR; FREQUENCY; CAVITY; PLATES; SHAPE;
D O I：
10.1016/j.cma.2019.112692
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Quality factor (Q) and frequency-quality factor (Qf) of prestressed membrane resonators are enhanced by topology optimization. The optimization targets the fundamental mode which is more easily identified in physical experiments compared to high-order modes embedded in possibly dense frequency ranges. Both intrinsic and extrinsic losses are considered in the optimization process. With different combinations of the two damping sources, topology optimization yields distinct designs, which reveals that damping mechanisms significantly affect the optimal geometry of micro resonators. For optimized designs, the Qf in the fundamental mode exceeds the minimum requirement for room-temperature quantum optomechanics (6.2x 10(12) Hz) and reaches 10(13) Hz in numerical experiments. (C) 2019 Elsevier B.Y. All rights reserved.
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页数：17
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