Analysis of a novel flexure hinge with three degrees of freedom

被引:24
作者
Hsiao, FZ
Lin, TW
机构
[1] Synchrotron Radiat Res Ctr, Hsinchu 30077, Taiwan
[2] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu, Taiwan
关键词
D O I
10.1063/1.1340024
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The flexure hinge is widely used as the mechanism for a high precision positioning stage with a micrometer or nanometer resolution. In this article we propose a novel flexure hinge with three degrees of freedom in which the motions are restricted in the same plane. An analysis model is developed to analyze the flexure hinge. The results obtained are consistent with those of the finite element method. A characteristic study using the proposed model shows that this flexure hinge has a feature of linear load displacement. In addition, the most effective way to change the stiffness of this flexure hinge is to modify the notch's radius. A prototype of this novel flexure hinge has been manufactured and the measured characteristics prove the advantages of this proposed model. (C) 2001 American Institute of Physics.
引用
收藏
页码:1565 / 1573
页数:9
相关论文
共 10 条
[1]   A precision piezodriven micropositioner mechanism with large travel range [J].
Chang, SH ;
Du, BC .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (04) :1785-1791
[2]  
COOK RD, 1985, ADV MECH MAT, P416
[3]  
GERE JM, 1984, MECH MATER, P354
[4]   DESIGN STRATEGIES FOR MONOLITHIC ADJUSTABLE-RADIUS METAL MIRRORS [J].
HOWELLS, MR .
OPTICAL ENGINEERING, 1995, 34 (02) :410-417
[5]  
Paros J M., 1965, Mach. Des, V37, P151
[6]   PIEZODRIVEN 50-MUM RANGE STAGE WITH SUB-NANOMETER RESOLUTION [J].
SCIRE, FE ;
TEAGUE, EC .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (12) :1735-1740
[7]   Elliptical flexure hinges [J].
Smith, ST ;
Badami, VG ;
Dale, JS ;
Xu, Y .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (03) :1474-1483
[8]   DESIGN AND ASSESSMENT OF MONOLITHIC HIGH-PRECISION TRANSLATION MECHANISMS [J].
SMITH, ST ;
CHETWYND, DG ;
BOWEN, DK .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1987, 20 (08) :977-983
[9]  
TANIGUCHI M, 1992, INT J JPN S PREC ENG, V26, P35
[10]  
XU W, 1997, PRECIS ENG, V19, P4