Spatially resolved information about the distribution and chemical composition of inclusions in steel are gained by scanning methods, such as scanning electron microscopy with energy dispersive X-ray spectroscopy, electron probe microanalysis or capillary-X-ray flourescence. Scanning laser-induced breakdown spectroscopy (LIBS) offers distinct advantages in contrast to these conventional methods. Sample polishing or high vacuum conditions are not necessary, a simple grinding of the sample is sufficient for the preparation. Analysing times can be reduced significantly. At Fraunhofer ILT a measuring system was developed enabling for the first time high-speed scanning LIBS with measuring frequencies of up to 1000 Hz. Sample surfaces with dimensions up to 110 X 45 mm(2) can be analyzed. Light elements such as C, N, O, P, and S are detected, which is demonstrated by the identification of nonmetallic inclusions in. steel. Principle, features and results of high-speed scanning LIBS with a spatial resolution < 20 mu m are presented. (c) 2005 Laser Institute of America.