Deposition of Ag/a-C:H nanocomposite films with Ag surface enrichment

被引：16

作者：

Vaidulych, Mykhailo ^{[1
]}

Hanus, Jan ^{[1
]}

Steinhartova, Tereza ^{[1
]}

Kylian, Ondrej ^{[1
]}

Choukourov, Andrei ^{[1
]}

Beranova, Jana ^{[2
]}

Khalakhan, Ivan ^{[1
]}

Biederman, Hynek ^{[1
]}

机构：

[1] Charles Univ Prague, Fac Math & Phys, V Holesovickach 2, CR-18000 Prague 8, Czech Republic

[2] Charles Univ Prague, Fac Sci, Prague, Czech Republic

来源：

PLASMA PROCESSES AND POLYMERS | 2017年 / 14卷 / 11期

关键词：

antibacterial coatings; gas aggregation sources; hard coatings; nanocomposites; nanoparticles; CARBON COATINGS; BIOMEDICAL APPLICATIONS; BIOLOGICAL EVALUATION; PLASMA; DLC; SIO2;

D O I：

10.1002/ppap.201600256

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The nanocomposite films Ag/a-C:H were prepared by vacuum-based method which combines deposition of Ag nanoparticles by means of gas aggregation source (GAS) and PECVD deposition of a-C:H matrix. The matrix was deposited in a mixture of Ar and n-hexane on the substrates placed on the powered RF electrode facing the beam of Ag NPs from the GAS. Anisotropic plasma etching was used to increase Ag concentration on the surface of the coating. The influence of three types of plasma on the chemical composition of the coatings and on the size of Ag nanoparticles is described. It is shown that the best etching selectivity and thus the highest Ag surface concentration was reached in case of etching of grounded samples in low pressure oxygen plasma. This treatment enhances the short term antibacterial efficiency of produced coatings.

引用

页数：8

共 30 条

[21] TiO2/polyaniline nanocomposite films prepared by magnetron sputtering combined with plasma polymerization process
Pal, Arup R.
Sarma, Bimal K.
Adhikary, Nirab C.
Chutia, Joyanti
Bailung, Heremba
[J]. APPLIED SURFACE SCIENCE, 2011, 258 (03) : 1199 - 1205
[22] Composite SiOx/hydrocarbon plasma polymer films prepared by RF magnetron sputtering of SiO2 and polyethylene or polypropylene
Pihosh, Y.
Biederman, H.
Slavinska, D.
Kousal, J.
Choukourov, A.
Trchova, M.
Mackova, A.
Boldyreva, A.
[J]. VACUUM, 2006, 81 (01) : 32 - 37
[23] Controlled syntheses of Ag-polytetrafluoroethylene nanocomposite thin films by co-sputtering from two magnetron sources
Schürmann, U
Hartung, W
Takele, H
Zaporojtchenko, V
Faupel, F
[J]. NANOTECHNOLOGY, 2005, 16 (08) : 1078 - 1082
[24] Effect of Ar/CH4 Mixture Ratio on Properties of Ag/C:H Nanocomposite Prepared by DC Sputtering
Soltani, E. Mohsen
Ghorannevis, Z.
Shirazi, M.
[J]. ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, 2013, 2013
[25] Multi-doped diamond like-carbon coatings (DLC-Si/Ag) for biomedical applications fabricated using the modified chemical vapour deposition method
Swiatek, Lidia
Olejnik, Anna
Grabarczyk, Jacek
Jedrzejczak, Anna
Sobczyk-Guzenda, Anna
Kaminska, Marta
Jakubowski, Witold
Szymanski, Witold
Bociaga, Dorota
[J]. DIAMOND AND RELATED MATERIALS, 2016, 67 : 54 - 62
[26] Structuring of DLC:Ag nanocomposite thin films employing plasma chemical etching and ion sputtering
Tamulevicius, Tomas
Tamuleviciene, Asta
Virganavicius, Dainius
Vasiliauskas, Andrius
Kopustinskas, Vitoldas
Meskinis, Sarunas
Tamulevicius, Sigitas
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2014, 341 : 1 - 6
[27] Antibacterial Surfaces and Coatings Produced by Plasma Techniques
Vasilev, Krasimir
Griesser, Stefani S.
Griesser, Hans J.
[J]. PLASMA PROCESSES AND POLYMERS, 2011, 8 (11) : 1010 - 1023
[28] Growth and characteristics of metal-containing diamond-like carbon using a self-assembled process
Wu, WY
Ting, JM
[J]. CARBON, 2006, 44 (07) : 1210 - 1217
[29] Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering
Wu, Yanxia
Chen, Jianmin
Li, Hongxuan
Ji, Li
Ye, Yinping
Zhou, Huidi
[J]. APPLIED SURFACE SCIENCE, 2013, 284 : 165 - 170
[30] Physico-chemical and antimicrobial properties of co-sputtered Ag-Au/PTFE nanocomposite coatings
Zaporojtchenko, V.
Podschun, R.
Schuermann, U.
Kulkarni, A.
Faupel, F.
[J]. NANOTECHNOLOGY, 2006, 17 (19) : 4904 - 4908

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