Short-focus silicon parabolic lenses for hard X-rays

被引：28
|
作者：
Aristov, VV [1 ]
Starkov, VV [1 ]
Shabel'nikov, LG [1 ]
Kuznetsov, SM [1 ]
Ushakova, AP [1 ]
Grigoriev, MV [1 ]
Tseitlin, VM [1 ]
机构：
[1] Russian Acad Sci, Inst Microelect Technol & High Pur Mat, Chernogolovka 142432, Moscow Dist, Russia
来源：
OPTICS COMMUNICATIONS | 1999年 / 161卷 / 4-6期
关键词：
X-ray; refraction; focusing; lens;
D O I：
10.1016/S0030-4018(99)00039-5
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Parabolic lenses have been formed by photoanodic etching of silicon in the form of profiles 22 mu m deep and 5 mu m in diameter. Observations with 17.46 keV radiation show that the focal length of the lenses is 7 cm and images with resolution of 3 mu m have been obtained. A procedure to evaluate the quality of real refracting profiles is suggested. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：203 / 208
页数：6
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