Three-Dimensional Stacked Multilayer Graphene Interconnects

被引：36

作者：

Yu, Tianhua ^{[1
]}

Liang, Chen-Wei ^{[1
]}

Kim, Changdong ^{[1
]}

Song, Eui-Sang ^{[1
]}

Yu, Bin ^{[1
]}

机构：

[1] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12203 USA

来源：

IEEE ELECTRON DEVICE LETTERS | 2011年 / 32卷 / 08期

关键词：

Contact resistivity; interconnect; sheet resistance; stacked multilayer graphene (s-MLG); LAYER GRAPHENE;

D O I：

10.1109/LED.2011.2158385

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We experimentally demonstrate stacked multilayer graphene (MLG) (s-MLG) as a new material system for high-performance carbon interconnects. Electrical performance is systematically characterized. We discover that the wire sheet resistance of s-MLG decreases with more layers stacking and shows better conductivity than that of the exfoliated MLG sample with the same layer numbers. The contact resistance of the s-MLG samples was calculated and confirmed using two different methods. It is demonstrated that a decrease in the intrinsic resistivity of s-MLG with increasing layer number is discovered; however, contact resistance will be saturated with more stacked layer numbers.

引用

页码：1110 / 1112

页数：3

共 16 条

[1]

[Anonymous], 2008, INT TECHNOLOGY ROADM

[2] Superior thermal conductivity of single-layer graphene [J].

Balandin, Alexander A. ;

Ghosh, Suchismita ;

Bao, Wenzhong ;

Calizo, Irene ;

Teweldebrhan, Desalegne ;

Miao, Feng ;

Lau, Chun Ning .

NANO LETTERS, 2008, 8 (03) :902-907

[3] Current saturation and electrical breakdown in multiwalled carbon nanotubes [J].

Collins, PG ;

Hersam, M ;

Arnold, M ;

Martel, R ;

Avouris, P .

PHYSICAL REVIEW LETTERS, 2001, 86 (14) :3128-3131

[4] Synthesis, Transfer, and Devices of Single- and Few-Layer Graphene by Chemical Vapor Deposition [J].

De Arco, Lewis Gomez ;

Zhang, Yi ;

Kumar, Akshay ;

Zhou, Chongwu .

IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2009, 8 (02) :135-138

[5] Approaching ballistic transport in suspended graphene [J].

Du, Xu ;

Skachko, Ivan ;

Barker, Anthony ;

Andrei, Eva Y. .

NATURE NANOTECHNOLOGY, 2008, 3 (08) :491-495

[6] Transfer of Large-Area Graphene Films for High-Performance Transparent Conductive Electrodes [J].

Li, Xuesong ;

Zhu, Yanwu ;

Cai, Weiwei ;

Borysiak, Mark ;

Han, Boyang ;

Chen, David ;

Piner, Richard D. ;

Colombo, Luigi ;

Ruoff, Rodney S. .

NANO LETTERS, 2009, 9 (12) :4359-4363

[7] Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils [J].

Li, Xuesong ;

Cai, Weiwei ;

An, Jinho ;

Kim, Seyoung ;

Nah, Junghyo ;

Yang, Dongxing ;

Piner, Richard ;

Velamakanni, Aruna ;

Jung, Inhwa ;

Tutuc, Emanuel ;

Banerjee, Sanjay K. ;

Colombo, Luigi ;

Ruoff, Rodney S. .

SCIENCE, 2009, 324 (5932) :1312-1314

[8] Conductance modeling for graphene nanoribbon (GNR) interconnects [J].

Naeemi, Azad ;

Meindl, James D. .

IEEE ELECTRON DEVICE LETTERS, 2007, 28 (05) :428-431

[9] Carbon Nanotube Interconnects [J].

Naeemi, Azad ;

Meindl, James D. .

ANNUAL REVIEW OF MATERIALS RESEARCH, 2009, 39 :255-275

[10] Systematic Investigation of the Intrinsic Channel Properties and Contact Resistance of Monolayer and Multilayer Graphene Field-Effect Transistor [J].

Nagashio, Kosuke ;

Nishimura, Tomonori ;

Kita, Koji ;

Toriumi, Akira .

JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (05) :0513041-0513046

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