Evaluation of adhesion and wear durability of ultrathin films by atomic force microscopy

被引：0
作者：
Umemura, S
Hirano, S
Andoh, Y
Kaneko, R
机构：
[1] Chiba Inst Technol, Dept Precis Engn, Fac Engn, Narashino, Chiba 2750016, Japan
[2] NTT AFTY Corp, Mitaka, Tokyo 1810013, Japan
[3] NTT, Cyber Space Labs, Musashino, Tokyo 1808585, Japan
[4] Wakayama Univ, Fac Syst Engn, Dept Optomechatron, Wakayama 6408510, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2001年 / 46卷 / 06期
关键词：
adhesion; wear; durability; thin film; protective film; carbon; scratch; AFM;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：439 / 446
页数：8
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