Measurement of III-V Compound Semiconductor Characteristics using the Contact less Electroreflectance Method

被引:1
作者
Yu, Jae-In [1 ]
Choi, Soon-Don [1 ,3 ]
Chang, Ho-Gyeong [2 ]
机构
[1] Yeungnam Univ, Sch Mat Sci & Engn, Gyongsan, South Korea
[2] DaeguHanny Univ, Dept Oriental Biomed Engn, Taegu, South Korea
[3] Yeungnam Univ, Dept Mat Sci & Engn, Gyongsan, South Korea
关键词
InAs; QD; CER; GaAs; Semiconductor; QUANTUM DOTS; ISLANDS; GROWTH; GAAS;
D O I
10.5370/JEET.2011.6.4.535
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The electromodulation methods of photoreflectanceand the related technique of contactless electroreflectance(CER) are valuable tools in the evaluation of important device parameters for structures such as heterojunction bipolar transistors, pseudomorphic high electron mobility transistors, and quantum dots(QDs). CER is a very general principle of experimental physics. Instead of measuring the optical reflectance of the material, the derivative with respect to a modulating electric field is evaluated. This procedure generates sharp, differential-like spectra in the region of interband (intersubband) transitions. We conduct electric-optical studies of both GaAs layers and InAs self-assembled QDs grown by molecular beam epitaxy. Strong GaAsbandgap energy is measured in both structures. In the case of InAs monolayers in GaAs matrices, the strong GaAsbandgap energy is caused by the lateral quantum confinement.
引用
收藏
页码:535 / 538
页数:4
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