PID Controller Based Intelligent Fuzzy Control of a SPM System Design

被引：0
作者：
Lin, Jium-Ming [1 ]
Chang, Po-Kuang [1 ]
机构：
[1] Chung Hua Univ, Coll Engn, Program Engn Sci, 707,Sec 2 Wu Fu Rd, Hsinchu 30012, Taiwan
来源：
NEW ASPECTS OF SYSTEMS THEORY AND SCIENTIFIC COMPUTATION | 2010年
关键词：
Ziegler-Nichols PID controller; PID Fuzzy controller; SPM; Hysteresis effect; LVT; FORCE MICROSCOPY;
D O I：
暂无
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
This research is to use Ziegler-Nichols PID controller as a basement for the fuzzy controller design in a Scanning Probe Microscope (SPM) to reduce the hysteresis effect. Comparing the results with a previous design for the outer-loop with PI compensator are also made, one can see that the proposed system is more robust.
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页码：258 / +
页数：2
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