Contactless testing of the surface of materials

被引：1

作者：

Hils, Bernd ^{[1
]}

von Spiegel, Wolff ^{[1
]}

Loeffler, Torsten ^{[1
]}

Roskos, Hartmut G. ^{[1
]}

机构：

[1] Univ Frankfurt, Inst Phys, D-60438 Frankfurt, Germany

来源：

TM-TECHNISCHES MESSEN | 2008年 / 75卷 / 01期

关键词：

THz imaging; surface metrology; heterodyne; profilometry;

D O I：

10.1524/teme.2008.0847

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The terahertz (THz) regime is rich in emerging possibilities for sensing and imaging. THz radiation has particular applications in optical metrology like the characterization of the surface topography of technical materials. Interferometry in the visible or near-IR wavelength regime becomes difficult or impossible if the surface roughness exceeds of a tenth of the wavelength. To support these applications, we discuss so-called hybrid techniques for generating, detecting THz "light", and demonstrate two methods for the accurate determination of the surface topography: THz reflectometry and THz heterodyne profilometry.

引用

页码：45 / 50

页数：6

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