On large area LIPSS coverage by multiple pulses

被引:32
作者
Reif, Juergen [1 ]
Martens, Christian [1 ]
Uhlig, Sebastian [1 ]
Ratzke, Markus [1 ]
Varlamova, Olga [1 ]
Valette, Stephane [2 ]
Benayoun, Stephane [2 ]
机构
[1] Brandenburg Tech Univ BTU Cottbus Senftenberg, D-03046 Cottbus, Germany
[2] Ecole Cent Lyon, LTDS, F-69134 Ecully, France
关键词
Laser induced periodic structures (ripples); Large-area coverage; Silicon; Femtosecond ablation; SUBWAVELENGTH RIPPLE FORMATION; PERIODIC SURFACE-STRUCTURES; LASER;
D O I
10.1016/j.apsusc.2014.11.153
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The phenomenon of covering large areas with coherent LIPSS produced by multiple, adjacent spots is investigated by varying spot overlap and irradiation dose per spot. In contrast to the typical experimental arrangement, the linear traces of spots were produced by discontinuously advancing the sample between the individual spots. We show that even with almost no overlap the LIPSS patterns appear to be coherently connected. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:249 / 254
页数:6
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