共 50 条
[32]
Thermal reliability analysis and optimization of polymer insulating through-silicon-vias (TSVs) for 3D integration
[J].
Science China Technological Sciences,
2014, 57
:128-135
[33]
Analytical model for parasitic capacitance of tapered Through-Silicon-Vias with MOS effect
[J].
Dianzi Yu Xinxi Xuebao/Journal of Electronics and Information Technology,
2013, 35 (12)
:3011-3017
[36]
Spectroscopic Reflectometry for Optimizing 3D Through-Silicon-Vias Process
[J].
METROLOGY,
2023, 3 (04)
:365-376
[40]
Characterization and Failure Analysis of Wafer Bonded Devices and unfilled Through-Silicon-Vias (TSVs)
[J].
ISTFA 2008: CONFERENCE PROCEEDINGS FROM THE 34TH INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS,
2008,
:368-+