An Effective and Efficient Approach for Layer Assignment with Thermal Through-Silicon-Vias Planning

被引:0
作者
Yeh, Hua-Hsin [1 ]
Huang, Chen-Yu [1 ]
Huang, Shih-Hsu [1 ]
Nieh, Yow-Tyng [2 ]
机构
[1] Chung Yuan Christian Univ, Dept Elect Engn, Chungli, Taiwan
[2] Ind Technol Res Inst, Informat & Commun Res Labs, Hsinchu, Taiwan
来源
2014 9TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE (IMPACT) | 2014年
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Three-dimensional integrated circuit (3D IC) process technology can improve the circuit speed and reduce the power dissipation. However, because of low thermal conductivities of dielectrics between active layers, the heat generated by the stacked layers results in a large temperature increase, which may degrade the circuit speed and reduce the circuit reliability. Previous work uses integer linear programming, which is an NP-hard approach, at the high-level design stage to deal with the simultaneous layer assignment and thermal TSVs planning for reducing the temperature increase. In this paper, we propose a heuristic algorithm to perform layer assignment with thermal TSVs planning in polynomial time complexity. Experimental results show that our approach is effective and efficient for reducing the temperature increase.
引用
收藏
页码:294 / 297
页数:4
相关论文
共 50 条
[21]   Low Capacitance Through-Silicon-Vias With Uniform Benzocyclobutene Insulation Layers [J].
Chen, Qianwen ;
Huang, Cui ;
Tan, Zhimin ;
Wang, Zheyao .
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY, 2013, 3 (05) :724-731
[22]   Study on atomic migration of copper through-silicon-vias with Bosch scallops [J].
Cheng, Zhiqiang ;
Ding, Yingtao ;
Xiao, Lei ;
Yang, Baoyan ;
Chen, Zhiming .
MICROELECTRONICS RELIABILITY, 2021, 123
[23]   A Study on the Thermomechanical Reliability Risks of Through-Silicon-Vias in Sensor Applications [J].
Shao, Shuai ;
Liu, Dapeng ;
Niu, Yuling ;
O'Donnell, Kathy ;
Sengupta, Dipak ;
Park, Seungbae .
SENSORS, 2017, 17 (02)
[24]   High-Frequency Characterization of Through-Silicon-Vias With Benzocyclobutene Liners [J].
Wu, Ke ;
Wang, Zheyao .
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY, 2017, 7 (11) :1859-1868
[25]   On reproducing the copper extrusion of through-silicon-vias from the atomic scale [J].
Liu, Jinxin ;
Huang, Zhiheng ;
Conway, Paul P. ;
Altmann, Frank ;
Petzold, Matthias ;
Naumann, Falk .
2017 18TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT), 2017, :789-796
[26]   Thermal Stress Characteristics and Reliability Impact on 3-D ICs Containing Through-Silicon-Vias [J].
Jiang, Tengfei ;
Ryu, Suk-Kyu ;
Zhao, Qiu ;
Im, Jay ;
Son, Ho-Young ;
Byun, Kwang-Yoo ;
Huang, Rui ;
Ho, Paul S. .
2012 IEEE 11TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT-2012), 2012, :244-246
[27]   Atomic layer deposition of super conformal copper seed layer for ultra-high aspect ratio through-silicon-vias [J].
Li, Ke ;
Zhang, Xinshuo ;
Jin, Lei ;
Wei, Lisi ;
Xia, Qifei ;
Xu, Rongbin ;
Lin, Weiyi ;
Zhong, Yi ;
Yu, Daquan .
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2025, 709
[28]   Temperature Rise Minimization through Simultaneous Layer Assignment and Thermal Through-Silicon-Via Planning [J].
Yeh, Hua-Hsin ;
Huang, Chen-Yu ;
Huang, Shih-Hsu .
2013 8TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE (IMPACT), 2013, :207-210
[29]   Second-harmonic microscopy of strain fields around through-silicon-vias [J].
Cho, Yujin ;
Shafiei, Farbod ;
Mendoza, B. S. ;
Lei, Ming ;
Jiang, Tengfei ;
Ho, P. S. ;
Downer, M. C. .
APPLIED PHYSICS LETTERS, 2016, 108 (15)
[30]   Thermal reliability analysis and optimization of polymer insulating through-silicon-vias (TSVs) for 3D integration [J].
Zhong ShunAn ;
Wang ShiWei ;
Chen QianWen ;
Ding YingTao .
SCIENCE CHINA-TECHNOLOGICAL SCIENCES, 2014, 57 (01) :128-135