Structural and optical properties of ge nanocrystals in SiO2 glasses fabricated by multi-energy ion implantation

被引：0
|
作者：
Masuda, K [1 ]
Yamamoto, M [1 ]
Kanaya, M [1 ]
Kanemitsu, Y [1 ]
机构：
[1] Nara Inst Sci & Technol, Grad Sch Mat Sci, Nara 6300101, Japan
来源：
MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS | 2000年
关键词：
D O I：
10.1109/IMNC.2000.872687
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：172 / 173
页数：2
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