Comparisons on the properties of (Zn1-xCOx)2-W type barium hexaferrite thin films prepared on the Si (100) and (111) substrates

被引:8
作者
Han, Mangui [1 ]
Lu, Haipeng [1 ]
Lin, Cuicui [1 ]
Deng, Longjiang [1 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
关键词
hexagonal ferrite; thin film; magnetron sputtering;
D O I
10.1016/j.tsf.2007.03.013
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The (Zn1-xCox)(2)-W type barium hexaferrite thin films have been prepared by a radio frequency magnetron sputtering method on the Si (100) and the Si (111) substrates respectively. With increasing the annealing temperatures (800, 850, 900, 950, and 1000 degrees C), the Ba(CoZn)(2)Fe16O27 phases emerge from the amorphous matrix. The hexaferrite thin films on Si (111) substrates have a larger saturation magnetic field (636.6 kA/m) than those on Si (100) substrates (159.1 kA/m). The magnetic hysteresis measurements show that they exhibit an isotropic behavior for thin films deposited on both substrates. Films on the Si (111) substrates are magnetically harder than those on the Si (100) substrates. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:7294 / 7298
页数:5
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