Evaluation of amorphous diamond-like carbon-nitrogen films as wear protective coatings on thin film media and thin film head sliders

被引:13
作者
Sivertsen, JM
Wang, G
Chen, GL
Judy, JH
机构
[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455
[2] SEAGATE TECHNOL,RECORDING MEDIA DIV,MILPITAS,CA 95035
关键词
DISK INTERFACE; SLIDING WEAR; OVERCOATS;
D O I
10.1109/20.560133
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
As the magnetic data storage industry strives to achieve ultra-high recording densities requiring fly heights of lass than one microinch, the tribology of the head-disk interface (HDI) is a limiting factor in disk drive design. Amorphous diamond-like-carbon (DLC) films have been the materials of choice for wear-protective coatings. Various amorphous DLC type coatings have been developed. The earliest DLC material was DC magnetron sputtered pure carbon films. Recent developments have produced C:H (hydrogenated-carbon) and C:N (carbon-nitrogen) films with greater wear-resistance than pure C fillm. Our intent is to describe and evaluate the wear-resistance performance of amorphous C:N films as wear-protective overcoats on thin film media and thin film sliders. Both C:H and C:N films have demonstrated superiority over DC magnetron sputtered pure carbon films. The bond character, microhardness, surface roughness features, and the physical nature of initial wear damage influence wear-resistance performance significantly. A recent report of nano-indentor measurements and wear-resistance performance confirmed the superiority of RF diode and DC magnetron Facing Target Sputtering (FTS) of thin C:N coatings over other DLC films.
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页码:926 / 931
页数:6
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