Abrupt stress induced transformation in amorphous carbon films with a highly conductive transition phase

被引：74

作者：

Lau, D. W. M. ^{[1
]}

McCulloch, D. G. ^{[1
]}

Taylor, M. B. ^{[1
]}

Partridge, J. G. ^{[1
]}

McKenzie, D. R. ^{[2
]}

Marks, N. A. ^{[2
]}

Teo, E. H. T. ^{[3
]}

Tay, B. K. ^{[3
]}

机构：

[1] RMIT Univ, Sch Appl Sci, Melbourne, Vic 3001, Australia

[2] Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia

[3] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

来源：

PHYSICAL REVIEW LETTERS | 2008年 / 100卷 / 17期

关键词：

D O I：

10.1103/PhysRevLett.100.176101

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We demonstrate that when, and only when, the biaxial stress is increased above a critical value of 6 +/- 1 GPa during the growth of a carbon film at room temperature, tetrahedral amorphous carbon is formed. This confirms that the stress present during the formation of an amorphous carbon film determines its sp(3) bonding fraction. In the vicinity of the critical stress, a highly oriented graphitelike material is formed which exhibits low electrical resistance and provides Ohmic contacts to silicon. Atomistic simulations reveal that the structural transitions are thermodynamically driven and not the result of dynamical effects.

引用

页数：4

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