Analysis of AlN thin films by combining TOF-ERDA and NRB techniques

被引：71

作者：

Jokinen, J ^{[1
]}

Haussalo, P ^{[1
]}

Keinonen, J ^{[1
]}

Ritala, M ^{[1
]}

Riihela, D ^{[1
]}

Leskela, M ^{[1
]}

机构：

[1] UNIV HELSINKI,DEPT CHEM,FIN-00014 HELSINKI,FINLAND

来源：

THIN SOLID FILMS | 1996年 / 289卷 / 1-2期

基金：

芬兰科学院;

关键词：

aluminium nitride; depth profiling; nuclear resonance broadening; time-of-flight elastic recoil detection analysis;

D O I：

10.1016/S0040-6090(96)08927-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Light atom impurities in polycrystalline AlN thin films deposited by atomic layer epitaxy on glass substrates have been analysed by combining two high-energy ion beam techniques, namely time-of-flight elastic recoil detection analysis and nuclear resonance broadening techniques. The advantages of their combined use in depth profiling of light elements, H, C, O and Cl impurity traces in the present study, are demonstrated in the framework of optimizing the production of pure AlN thin films from AlCl3 and Al(CH3)(3) aluminium sources.

引用

页码：159 / 165

页数：7

共 41 条

[1]

[Anonymous], 1984, CRC HDB CHEM PHYS, V65th, pE

[2] TOF ERD EXPERIMENTS USING A 10 MEV CL-35 BEAM [J].

ARAI, E ;

FUNAKI, H ;

KATAYAMA, M ;

OGURI, Y ;

SHIMIZU, K .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4) :296-300

[3] PROFILING OF SEMICONDUCTOR SURFACE-LAYERS BY HEAVY-ION TOF-E-ERD [J].

ARAI, E ;

ZOUNEK, A ;

SAITO, K .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 79 (1-4) :518-520

[4]

ARAI EA, COMMUNICATION

[5] ON THE USE OF A DE-E TELESCOPE IN ELASTIC RECOIL DETECTION [J].

BIK, WMA ;

DELAAT, CTAM ;

HABRAKEN, FHPM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4) :832-835

[6] ELASTIC RECOIL DETECTION [J].

BIK, WMA ;

HABRAKEN, FHPM .

REPORTS ON PROGRESS IN PHYSICS, 1993, 56 (07) :859-902

[7]

BOHR N, 1948, MAT FYS MEDD DAN VID, V18

[8] A POSITION-SENSITIVE TRANSMISSION TIME DETECTOR [J].

BUSCH, F ;

PFEFFER, W ;

KOHLMEYER, B ;

SCHULL, D ;

PUHLHOFFER, F .

NUCLEAR INSTRUMENTS & METHODS, 1980, 171 (01) :71-74

[9]

*CERN, 1995, PHYS AN WORKST

[10]

Chu W., 1978, BACKSCATTERING SPECT, DOI DOI 10.1016/B978-0-12-173850-1.50008-9

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