Acoustic property of PbTiO3/SrTiO3 multilayer structures prepared by MOCVD and PLD methods

被引：12
作者：
Yu, T [1 ]
Chen, YF
Zhu, YY
Liu, ZG
Ming, NB
Wu, XS
机构：
[1] Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China
[2] Shandong Univ, Inst Crystal Mat, Jinan 250100, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 1999年 / 138卷
关键词：
acoustic property; PbTiO3-/SrTiO3 multilayer structures;
D O I：
10.1016/S0169-4332(98)00461-9
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
PbTiO3/SrTiO3 (PT/ST) multilayer structures have been fabricated on Pt/SrTiO3 and Pt/LaAlO3 substrates. The PT layers were prepared by metalorganic chemical vapor deposition (MOCVD) and the ST layers were prepared by pulsed laser deposition (PLD). The typical thickness of each PT and ST layer was 100 nm. The periodic number of the multilayer structures was 3,5,8,10, respectively. X-ray diffraction theta-2 theta scan results indicated that the PT layers were (001) oriented in these multilayers. Several sets of acoustic resonators have been made of these mutilayer structures. The high-frequency acoustic resonance properties were analysed with a HP 8510C network analyzer. (C) 1999 Elsevier Science B.V. All rights reserved.
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收藏
页码：609 / 612
页数：4
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