Silicon hydride composition of plasma-deposited hydrogenated amorphous and nanocrystalline silicon films and surfaces

In situ attenuated total reflection Fourier transform infrared spectroscopy was used to study the H bonding on the surfaces of a-Si:H and nc-Si:H during plasma enhanced chemical vapor deposition from SiH4/H-2/Ar containing discharges. Well-resolved SiHx (1 less than or equal to x less than or equal to 3) absorption lines that correspond to the vibrational frequencies commonly associated with surface silicon hydrides were detected. During deposition of a-Si:H films using SiH4 without H-2 dilution; the surface coverage was primarily di- and trihydrides, and there are very few dangling bonds on the surface. In contrast, during deposition of nc-Si:H using SM, diluted with H-2, the amount of di- and trihydrides on the surface is drastically reduced and monohydrides dominate the surface. Furthermore, the vibrational frequencies of the monohydrides on nc-Si:H film surfaces match well with the resonant frequencies of monohydrides on H terminated Si (111) and Si (100) surfaces. The decrease of higher hydrides on the surface upon H-2 dilution is attributed to increased dissociation rate of tri- and dihydrides on the surface through reaction with dangling bonds created by increased rate of H abstraction from the surface. Results presented are consistent with SiH3 being at least one of the precursors of a-Si:H deposition. (C) 1998 America Vacuum Society. [S0734-2101(98)05506-7].