An effective method to optimise plasma immersion ion implantation: Sensitivity analysis and design based on low-density polyethylene

被引:10
作者
Chen, Yuan [1 ]
Xu, Can [2 ]
Bilek, Marcela M. M. [3 ,4 ]
Cheng, Xinying [1 ,4 ,5 ]
Wang, Chun-Hui [5 ]
机构
[1] Univ Sydney, Ctr Adv Mat Technol CAMT, Sch Aerosp Mech & Mechatron Engn, Sydney, NSW 2006, Australia
[2] Shanghai Jiao Tong Univ, Sch Mech Engn, Shanghai, Peoples R China
[3] Univ Sydney, Sch Phys, Appl & Plasma Phys Lab, Sydney, NSW, Australia
[4] Univ Sydney, Sch Biomed Engn, Sydney, NSW, Australia
[5] Univ New South Wales, Sch Mech & Mfg Engn, Kensington, NSW, Australia
关键词
LDPE; optical properties; plasma immersion ion implantation; radicals; sensitivity analysis; SURFACE MODIFICATION; STRUCTURAL-CHANGES; NITROGEN; ACTIVATION; VARIABLES; RADICALS; KINETICS; FILMS;
D O I
10.1002/ppap.202100199
中图分类号
O59 [应用物理学];
学科分类号
摘要
The performance of polymer surface treatment using plasma immersion ion implantation (PIII) depends on many operating parameters, such as treatment duration, radiofrequency power, pulsed bias voltage and pulse repetition rate, and the ion fluence applied on the polymer surface. Currently, the identification of optimal operating parameters to achieve specific performance targets is heavily based on trail and error with extensive experimental testing. Herein, we present an optimisation method based on sensitivity analysis using polynomial chaos expansion and experimental design with Kriging surrogate model to greatly reduce the amount of experiments. The combined effects of PIII operating parameters on low-density polyethylene surface modifications are investigated, demonstrating the validation and effectiveness of the method and design. The new approach offers highly accurate and computationally efficient way for achieving optimum radical density, wettability and optical transmittance that are important for biomedical applications.
引用
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页数:15
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