Mechanical properties of silicones for MEMS

被引：352

作者：

Schneider, F. ^{[1
]}

Fellner, T. ^{[2
]}

Wilde, J. ^{[2
]}

Wallrabe, U. ^{[1
]}

机构：

[1] Univ Freiburg, Dept Microsyst Engn, Lab Micoactuators, IMTEK, D-79110 Freiburg, Germany

[2] Univ Freiburg, Dept Microsyst Engn, Lab Assembly & Packaging, IMTEK, D-79110 Freiburg, Germany

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2008年 / 18卷 / 06期

关键词：

D O I：

10.1088/0960-1317/18/6/065008

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper focuses on the mechanical properties of polydimethylsiloxane (PDMS) relevant for microelectromechanical system (MEMS) applications. In view of the limited amount of published data, we analyzed the two products most commonly used in MEMS, namely RTV 615 from Bayer Silicones and Sylgard 184 from Dow Corning. With regard to mechanical properties, we focused on the dependence of the elastic modulus on the thinner concentration, temperature and strain rate. In addition, creep and thermal aging were analyzed. We conclude that the isotropic and constant elastic modulus has strong dependence on the hardening conditions. At high hardening temperatures and long hardening time, RTV 615 displays an elastic modulus of 1.91 MPa and Sylgard 184 of 2.60 MPa in a range up to 40% strain.

引用

页数：9

共 42 条

[1]

ACHENBACH C, 2007, COMMUNICATION

[2]

[Anonymous], P TRANSD 95 8 INT C

[3] A novel electronic nose based on miniaturized SAW sensor arrays coupled with SPME enhanced headspace-analysis and its use for rapid determination of volatile organic compounds in food quality monitoring [J].

Barié, N ;

Bücking, M ;

Rapp, M .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 114 (01) :482-488

[4] Optical oxygen sensor coating based on the fluorescence quenching of a new pyrene derivative [J].

Basu, BJ ;

Thirumurugan, A ;

Dinesh, AR ;

Anandan, C ;

Rajam, KS .

SENSORS AND ACTUATORS B-CHEMICAL, 2005, 104 (01) :15-22

[5] A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator [J].

Böhm, S ;

Burger, GJ ;

Korthorst, MT ;

Roseboom, F .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 80 (01) :77-83

[6] PHOTOPHYSICS AND PHOTOCHEMISTRY OF OXYGEN SENSORS BASED ON LUMINESCENT TRANSITION-METAL COMPLEXES [J].

CARRAWAY, ER ;

DEMAS, JN ;

DEGRAFF, BA ;

BACON, JR .

ANALYTICAL CHEMISTRY, 1991, 63 (04) :337-342

[7] Inhibition of ampicillin-resistant bacteria by novel mono-DNAzymes and di-DNAzyme targeted to β-lactamase mRNA [J].

Chen, F ;

Li, Z ;

Wang, RJ ;

Liu, B ;

Zeng, Z ;

Zhang, HY ;

Zhang, J .

OLIGONUCLEOTIDES, 2004, 14 (02) :80-89

[8] A photocurable poly(dimethylsiloxane) chemistry designed for soft lithographic molding and printing in the nanometer regime [J].

Choi, KM ;

Rogers, JA .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2003, 125 (14) :4060-4061

[9] Electrodeless dielectrophoresis of single- and double-stranded DNA [J].

Chou, CF ;

Tegenfeldt, JO ;

Bakajin, O ;

Chan, SS ;

Cox, EC ;

Darnton, N ;

Duke, T ;

Austin, RH .

BIOPHYSICAL JOURNAL, 2002, 83 (04) :2170-2179

[10] A Microfabricated Rotary Pump [J].

Chou, Hou-Pu ;

Unger, Marc A. ;

Quake, Stephen R. .

BIOMEDICAL MICRODEVICES, 2001, 3 (04) :323-330

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