Ion emission and electric field characteristics in the liquid metal ion source with a new suppressor electrode

被引：4

作者：

Cho, Byeong Seong ^{[1
]}

Oh, Hyun Joo ^{[1
]}

Uhm, Han S. ^{[1
]}

Kang, Seung Oun ^{[1
]}

Kim, Changjo ^{[2
]}

Choi, Yoon ^{[2
]}

Choi, Eun Ha ^{[1
]}

机构：

[1] Kwangwoon Univ, Dept Elect, Charged Particle Beam & Plasma Lab, Seoul 139701, South Korea

[2] A Tech Syst, Inchon, South Korea

来源：

CURRENT APPLIED PHYSICS | 2011年 / 11卷 / 05期

基金：

新加坡国家研究基金会;

关键词：

Liquid metal ion source; Focused ion beam; Suppressor; Electric field; Field ion emission;

D O I：

10.1016/j.cap.2011.03.069

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The liquid metal ion sources (LMIS) in focused ion beam (FIB) system have many advantages of high current density, high brightness and low ion energy spread. There are two electrodes being emitter and extractor for field ion emission in LMIS. But several LMIS have a new electrode called the suppressor. Characteristics of LMIS with a suppressor are investigated in terms of the electric field change due to the suppressor. The threshold and extinguishing voltages are investigated under the varying a suppressor voltage for a specified source voltage, and also currentevoltage (IeV) characteristics have been observed in terms of the voltage difference between the source and extractor for the various suppressor voltages. It is found that the emission current decreases as the suppressor voltage increases since the increase in the suppressor voltage reduces the electric field. It is also noted that the threshold and extinguishing voltages are increased as the suppressor voltage increases. (C) 2011 Elsevier B. V. All rights reserved.

引用

页码：S172 / S176

页数：5

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