共 43 条
[4]
Low temperature temporal and spatial atomic layer deposition of TiO2 films
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2015, 33 (04)
[8]
Room temperature TiO2 atomic layer deposition on collagen membrane from a titanium alkylamide precursor
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2017, 35 (01)