An integrated optical waveguide micro-cantilever system for chip-based AFM

被引：0

作者：

Tang, Xinxin ^{[1
]}

Fan, Guofang ^{[1
]}

Zhang, Hongru ^{[1
]}

Dai, Xingang ^{[1
]}

Hu, Yanjun ^{[1
]}

Zhang, Zhiping ^{[3
]}

Li, Yuan ^{[2
]}

机构：

[1] Beijing Jiaotong Univ, Inst Lightwave Technol, Key Lab All Opt Network & Adv Telecommun Network, Minist Educ, Beijing 100044, Peoples R China

[2] Natl Ctr Testing Technol, Natl Ctr Measurement & Testing East China, Shanghai Inst Measurement & Testing Technol, Shanghai, Peoples R China

[3] Fudan Univ, Acad Engn & Technol, Shanghai, Peoples R China

来源：

JOURNAL OF MICROSCOPY | 2022年 / 285卷 / 02期

基金：

国家重点研发计划;

关键词：

atomic force microscopy (AFM); chip-based; integrated optical waveguide cantilever system; nano-tip; ATOMIC-FORCE MICROSCOPY; DESIGN;

D O I：

10.1111/jmi.13080

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

An optical waveguide cantilever system with a tip is introduced as the displacement detection system of chip-based atomic force microscopy (AFM) system. A chip-based AFM on optical waveguide is demonstrated with sensitivity of up to 4.0 x 10(-2) nm(-1), which is mainly constructed by a 210 nm thick optical waveguide cantilever with a nano-tip. The nano-tip is a height of 1.2 mu m and diameter of 140 nm. This integrated on-chip system provides a displacement range of approximately +/- 0.4 mu m, which makes it possible for the device to be used for AFM imaging and pays the way for further performance improvement.

引用

页码：112 / 116

页数：5

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