High-Precision, Mixed-Signal Mismatch Measurement of Metal-Oxide-Metal Capacitors

被引：7

作者：

Bustamante, Danilo ^{[1
]}

Janke, Devon ^{[2
]}

Swindlehurst, Eric ^{[1
]}

Chiang, Shiuh-Hua Wood ^{[3
]}

机构：

[1] Brigham Young Univ, Provo, UT 84602 USA

[2] Georgia Inst Technol, Atlanta, GA 30332 USA

[3] Brigham Young Univ, Dept Elect & Comp Engn, Provo, UT 84602 USA

来源：

IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS II-EXPRESS BRIEFS | 2017年 / 64卷 / 11期

关键词：

Analog-to-digital converter (ADC); capacitance measurement; capacitor mismatch; metal-oxide-metal (MoM) capacitor; mismatch characterization;

D O I：

10.1109/TCSII.2016.2642820

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This brief presents a high-precision, mixed-signal mismatch measurement technique for metal-oxide-metal capacitors. The proposed technique incorporates a switched-capacitor op amp within the measurement circuit to significantly improve the measurement precision while relaxing the resolution requirement on the backend analog-to-digital converter (ADC). The proposed technique is also robust against multiple types of errors. A detailed analysis is presented to quantify the sensitivity improvement of the proposed technique over the conventional one. In addition, this brief proposes a multiplexing technique to measure a large number of capacitors in a single chip and a new layout to improve matching. A prototype fabricated in 180 nm technology demonstrates the ability to sense capacitor mismatch standard deviation as low as 0.045% with excellent repeatability, all without the need of a high-resolution ADC.

引用

页码：1272 / 1276

页数：5