Scatterometric analysis of chatter marks occurring in industrial grinding processes

被引:0
作者
Boehm, J. [1 ]
Vernes, A. [1 ,2 ]
Jech, M. [1 ]
Vellekoop, M. [3 ]
机构
[1] Austrian Ctr Competence Tribol, Viktor Kaplan Str 2, A-2700 Wr Neustadt, Austria
[2] Vienna Univ Technol, Inst Appl Phys, A-1040 Vienna, Austria
[3] Vienna Univ Technol, Inst Sensor & Actuator Syst, A-1040 Vienna, Austria
来源
OPTICAL MICRO- AND NANOMETROLOGY III | 2010年 / 7718卷
关键词
diffuse light scattering; confocal white light microscopy; rough surface; optical micrometrology; process monitoring; fast Fourier transform; grinding; chatter marks;
D O I
10.1117/12.854419
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Grinding processes often underlie chattering which results in a wavy surface of the ground metal sheet. In this work it will be shown that the angle resolved light scattering method is not only suitable to monitor industrial grinding processes, in both waviness and roughness modes, but also enables the determination of the waviness of a ground surface. Furthermore it is demonstrated that the roughness, e. g. the average roughness R-a and roughness depth R-z, of a ground surface directly depends on the grinding pressure. The light scattering value A(q) correlates with the roughness values obtained with a stylus probe system. In this way it is proven that the light scattering system unambiguously determines chatter marks and the roughness of a metal sheet during a grinding process.
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页数:7
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