Fully electronic DNA detection on a CMOS chip: Device and process issues

被引：0

作者：

Hofmann, F ^{[1
]}

Frey, A ^{[1
]}

Holzapfl, B ^{[1
]}

Schienle, M ^{[1
]}

Paulus, C ^{[1
]}

Schindler-Bauer, P ^{[1
]}

Kuhlmeier, D ^{[1
]}

Krause, J ^{[1
]}

Hintsche, R ^{[1
]}

Nebling, E ^{[1
]}

Albers, J ^{[1
]}

Gumbrecht, W ^{[1
]}

Plehnert, K ^{[1
]}

Eckstein, G ^{[1
]}

Thewes, R ^{[1
]}

机构：

[1] Infineon Technol, Corp Res, D-81730 Munich, Germany

来源：

INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST | 2002年

关键词：

D O I：

暂无

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

A sensor array for fully electronic detection of DNA molecules is fabricated using an extended CMOS process. A gold deposition process module and a compartment are integrated in the CMOS backend process. DNA detection is performed using a redox-cycling based electrochemical technique. Process and device issues and the impact of different processing variants on the circuit performance of the chip are discussed in detail. The result of biological experiments on chips with 128 positions are shown to prove the success of the chosen approach.

引用

页码：488 / 491

页数：4