Surface versus bulk micromachining: the contest for suitable applications

被引：23
作者：
French, PJ
Sarro, PM
机构：
[1] Delft Univ Technol, Fac Elect Engn, DIMES, Lab Elect Instrumentat, NL-2628 CD Delft, Netherlands
[2] Lab ECTM, NL-2628 CT Delft, Netherlands
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1998年 / 8卷 / 02期
关键词：
D O I：
10.1088/0960-1317/8/2/002
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In the development of silicon based micromachining two quite different technologies have emerged, those of bulk and surface micromachining. Today both technologies are widely available and are still being further developed. There are considerable differences in the processing technologies of the two techniques leading to differences in the structures which can be fabricated. In some applications the technologies are in direct competition, whereas some are dominated by one or the other. This paper will present the advantages and disadvantages of each technology in the contest for applications.
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收藏
页码：45 / 53
页数：9
相关论文
共 42 条
  • [1] ABE T, 1995, MICRO ELECTRO MECHANICAL SYSTEMS - IEEE PROCEEDINGS, 1995, P94, DOI 10.1109/MEMSYS.1995.472547
  • [2] [Anonymous], P 8 INT C SOL STAT S
  • [3] ANISOTROPIC ETCHING OF SILICON
    BEAN, KE
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193
  • [4] Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3
  • [5] Impact of MEMS technology on society
    Bryzek, J
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1996, 56 (1-2) : 1 - 9
  • [6] BUHLER J, 1995, 8 INT C SOL STAT SEN, V2, P360
  • [7] DEWA AS, 1997, P TRANSD 97 CHIC JUN, P757
  • [8] INTEGRATED MOVABLE MICROMECHANICAL STRUCTURES FOR SENSORS AND ACTUATORS
    FAN, LS
    TAI, YC
    MULLER, RS
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 724 - 730
  • [9] FAN LS, 1987, P TRANSD 87 TOK, P849
  • [10] Laminated high-aspect-ratio microstructures in a conventional CMOS process
    Fedder, GK
    Santhanam, S
    Reed, ML
    Eagle, SC
    Guillou, DF
    Lu, MSC
    Carley, LR
    [J]. NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, : 13 - 18
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