Bandwidth-tunable Filter Consisting of SAW Resonators and BaSrTiO3 Varactors Directly Fabricated on a LiTaO3 Wafer

被引：7

作者：

Kimura, Tetsuya ^{[1
]}

Kobayashi, Hideaki ^{[1
]}

Kishimoto, Yutaka ^{[1
]}

Kato, Hideyuki ^{[1
]}

Inaba, Masahiro

Hashimoto, Ken-ya ^{[2
]}

Matsumura, Takeshi ^{[3
]}

Hirano, Hideki ^{[4
]}

Kadota, Michio ^{[4
]}

Esashi, Masayoshi ^{[4
]}

Tanaka, Shuji ^{[4
]}

机构：

[1] Murata Mfg Co Ltd, Kyoto, Japan

[2] Chiba Univ, Grad Sch Engn, Chiba, Japan

[3] Natl Inst Informat & Commun Technol, Kanagawa, Japan

[4] Tohoku Univ, Microsyst Integrat Ctr, Sendai, Miyagi 980, Japan

来源：

2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2014年

关键词：

tunable filter; BaSrTiO3; LiTaO3;

D O I：

10.1109/ULTSYM.2014.0195

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600 degrees C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42 degrees YX-LiTaO3 wafer was newly developed to prevent performance deterioration in SAW resonators. The bandwidth-tunable filter composed of ten pieces of both surface acoustic wave (SAW) resonators and BST varactors on the 42 degrees YX-LiTaO3 substrate was successfully fabricated using the integration process. The measured center frequency of the filter is 1GHz, and the 3dB bandwidth is electrically tuned from 4.5 to 9.6MHz by adjusting a DC supply voltage from 0 to 10V.

引用

页码：795 / 798

页数：4

共 14 条

[1] [Anonymous], 2014, IEEE STAND INF TE 11
[2] [Anonymous], 2011, IEEE STAND INF TE 22
[3] Harada H., 2008, IEICE B, VJ91-B, P1320
[4] Hirano H., 2012, P 2012 INT S AC WAV, P41
[5] Integration of BST varactors with surface acoustic wave device by film transfer technology for tunable RF filters
Hirano, Hideki
Kimura, Tetsuya
Koutsaroff, Ivoyl P.
Kadota, Michio
Hashimoto, Ken-ya
Esashi, Masayoshi
Tanaka, Shuji
[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2013, 23 (02)
[6] A Configuration of Widely Tunable Surface Acoustic Wave Filter
Inaba, Masahiro
Omori, Tatsuya
Hashimoto, Ken-ya
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2013, 52 (07)
[7] Tunable Radio-Frequency Filters Using Acoustic Wave Resonators and Variable Capacitors
Komatsu, Tomoya
Hashimoto, Ken-ya
Omori, Tatsuya
Yamaguchi, Masatsune
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (07)
[8] Konno A., 2012, P 2012 INT S AC WAV, P45
[9] Matsuda T, 2012, 2012 MOSHARAKA INTERNATIONAL CONFERENCE ON COMMUNICATIONS, COMPUTERS AND APPLICATIONS (MIC-CCA), P65
[10] Matsumura T., 2010, SR20104 IEICE

← 1 2 →