X-ray wavefront analysis and optics characterization with a grating interferometer -: art. no. 054101

被引:156
作者
Weitkamp, T [1 ]
Nöhammer, B
Diaz, A
David, C
Ziegler, E
机构
[1] Paul Scherrer Inst, Lab Micro & Nanotechnol, Villigen, Switzerland
[2] European Synchrotron Radiat Facil, Expt Div, Grenoble, France
关键词
D O I
10.1063/1.1857066
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present an interferometric method to measure the shape of a hard-x-ray wavefront. The interferometer consists of a phase grating as a beam splitter and an absorption grating as a transmission mask for the detector. The device can be used to measure wavefront shape gradients corresponding to radii of curvature as large as several dozens of meters, with a lateral resolution of a few microns. This corresponds to detected wavefront distortions of approximately 10-(12) M or lambda/100. The device was used with 12.4 keV x rays to measure the slope error and height profile of an x-ray mirror. Surface slope variations with periods ranging from less than I mm to more than I m can be detected with an accuracy better than 0.1 murad. (C) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
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