In the present work we show that by anodization of W in NaF electrolytes porous tungsten oxide layers can be formed under a range of experimental conditions. The morphology of the layers depends strongly on the NaF concentration as well as the formation potential. Under optimized electrochemical conditions self-organized porous tungsten oxide layers can be formed. The single pore openings are very regular and have an average pore diameter of 100 nm. (C) 2005 Elsevier B.V. All rights reserved.