Deposition of super-hydrophobic fluorocarbon coatings in modulated RF glow discharges

被引:124
作者
Favia, P [1 ]
Cicala, G [1 ]
Milella, A [1 ]
Palumbo, F [1 ]
Rossini, R [1 ]
d'Agostino, R [1 ]
机构
[1] Univ Bari, Dept Chem, IMIP, CNR Bari, I-70126 Bari, Italy
关键词
modulated plasmas; fluoropolymers; super hydrophobic coatings;
D O I
10.1016/S0257-8972(03)00123-3
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Superhydrophobic coatings were deposited in modulated RF glow discharges fed with tetrafluorothylene. Such coatings are characterized by a high fluorination degree, ribbon-like randomly distributed surface microstructures, and a certain crystallinity. Combined high fluorination degree and surface texture/roughness leads to the super hydrophobic behaviour, as attested by water contact angle values of 150degrees and more. The coatings were characterized by means of XPS, FT-IR and X-ray diffraction, while time resolved optical emission spectroscopy was utilized to investigate the plasma phase. (C) 2003 Elsevier Science B.V All rights reserved.
引用
收藏
页码:609 / 612
页数:4
相关论文
共 9 条
[1]  
BADYAL JPS, 1998, Patent No. 58117
[2]   Time-resolved optical emission spectroscopy of modulated plasmas for amorphous silicon deposition [J].
Cicala, G. ;
Losurdo, M. ;
Capezzuto, P. ;
Bruno, G. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (03) :156-165
[3]   Ultralow surface energy plasma polymer films [J].
Coulson, SR ;
Woodward, IS ;
Badyal, JPS ;
Brewer, SA ;
Willis, C .
CHEMISTRY OF MATERIALS, 2000, 12 (07) :2031-2038
[4]  
DAGOSTINO R, 2000, Patent No. 14297
[5]  
GARBASSI F, 1994, POLYM SURFACES PHYSI
[6]  
GLEASON KK, 1999, Patent No. 5888591
[7]  
Limb S. J., 1999, Plasmas and Polymers, V4, P21, DOI 10.1023/A:1021899414807
[8]   Flexible fluorocarbon wire coatings by pulsed plasma enhanced chemical vapor deposition [J].
Limb, SJ ;
Gleason, KK ;
Edell, DJ ;
Gleason, EF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1997, 15 (04) :1814-1818
[9]  
PANCHALINGAM V, 1993, J BIOMAT SCI-POLYM E, V5, P131