Large amplitude free vibration of electrically actuated nanobeams with surface energy and thermal effects

被引:26
作者
Wang, K. F. [1 ]
Zeng, S. [1 ]
Wang, B. L. [1 ]
机构
[1] Harbin Inst Technol, Grad Sch Shenzhen, Harbin 150001, Heilongjiang, Peoples R China
基金
中国国家自然科学基金; 中国博士后科学基金;
关键词
Nonlinear vibration; Surface energy; Nanobeam; Casimir force; Thermal effect; NANOSCALE ELECTROSTATIC ACTUATORS; PULL-IN INSTABILITY; CASIMIR FORCE; MICROMECHANICAL SYSTEMS; BEHAVIOR; MEMS; PERFORMANCE; ELASTICITY; STICTION; SWITCHES;
D O I
10.1016/j.ijmecsci.2017.06.049
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
In this paper, large amplitude free vibration of electrically actuated nanobeams with consideration of surface energy, temperature change and Casimir force is studied. Results show that neglecting of surface energy and intermolecular Casimir force will result in a lower prediction and a higher prediction of fundamental frequency, respectively. Thermal effect may change the relationship between fundamental frequency and applied voltage. In addition, the effect of geometric nonlinear deformation on the fundamental frequency is more significant for large applied voltage. The influence of surface energy and geometric nonlinear deformation on the fundamental frequency depends on the length and height of the nanobeams. (C) 2017 Elsevier Ltd. All rights reserved.
引用
收藏
页码:227 / 233
页数:7
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