Development of a large high-performance 2-D array of GaAs-AlGaAs multiple quantum-well modulators

被引：34

作者：

Arad, U ^{[1
]}

Redmard, E

Shamay, M

Averboukh, A

Levit, S

Efron, U

机构：

[1] Lenslet, IL-46733 Herzelia Pituach, Israel

[2] Weizmann Inst Sci, Dept Condensed Matter, IL-76100 Rehovot, Israel

[3] Ben Gurion Univ Negev, Dept Electro Opt, IL-84105 Beer Sheva, Israel

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2003年 / 15卷 / 11期

关键词：

arrays; excitons; Fabry-Perot resonators; optical correlators; quantum-confined Stark effect; quantum wells; spatial light modulators; ultrahigh-frequency modulation;

D O I：

10.1109/LPT.2003.818663

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present the development of an ultrafast two-dimensional (288 x 132 elements) reflection modulator array based on GaAs-AlGaAs multiple quantum-wells embedded in asymmetric Fabry-Perot structure. The array has low operation voltage (< 4 V), low insertion loss, and high contrast ratio at similar to846 nm. This array was hybridized to 0.25 um complementary metal-oxide-semiconductor driver providing 256 gray levels resolution at frame rate of 50 kHz (driver limited). Major progress in reducing the severe nonuniformity problem of the cavity resonance wavelength in such devices to less than 3.4 nm variation across a 4-in wafer was achieved.

引用

页码：1531 / 1533

页数：3