Fabrication method of spacers with high aspect ratio - Used in a field emission display (FED)

Glass to glass anodic bonding using a metal interlayer was used to develop a fabrication method of spacer for field emission display (FED). In this paper, spacers with width 100 mum and height 1000 mum and a 3.54 inch mono color anode plate patterned with Al/Cr him as an interlayer were bonded by the anodic bonding. To bond the spacers on the anode plate vertically, two types of spacer holders were designed and fabricated with photo-etchable glass and n(110) Si wafer. The spacer holder using. Si wafer was used to fabricate for evacuated FED panel.