A compact spectrometer based on a micromachined torsional mirror device

被引：20

作者：

Kenda, A ^{[1
]}

Scherf, W ^{[1
]}

Hauser, R ^{[1
]}

Grüger, H ^{[1
]}

Schenk, H ^{[1
]}

机构：

[1] Carinthian Tech Res AG, A-9524 Villach, Austria

来源：

PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3 | 2004年

关键词：

micro-spectrometer; MEMS; MOEMS; micro-scanning-mirror;

D O I：

10.1109/ICSENS.2004.1426423

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper we describe a spectrometer employing a micro electro mechanical system (MEMS). A torsional micro mirror device which was originally designed for laser scanner applications has been modified accordingly to act as a diffraction grating, in a Czerny-Turner setup. This spectrometer system combines the working principle of a scanning monochromator with the compactness of a microsystem. The micro mirror device is operated in a harmonic scanning mode at a resonance frequency of 500 Hz, enabling the system to acquire a spectrum per half Cycle in one millisecond. Spectra of a calibration source in the visible and near-infrared spectral range as well as simulations concerning the optical system demonstrate the perk formance of the spectrometer.

引用

页码：1312 / 1315

页数：4

共 7 条

[1]

CONTANT R, 2003, MICROMACHINED MIRROR, P79

[2]

GRUGER, 2003, INTEGRATED OPTOELECT

[3]

GRUGER, 2002, SPIE, V4945

[4]

ROSCHER KU, 2003, P SPIE, V4985

[5] Large deflection micromechanical scanning mirrors for linear scans and pattern generation [J].

Schenk, H ;

Dürr, P ;

Haase, T ;

Kunze, D ;

Sobe, U ;

Lakner, H ;

Kück, H .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2000, 6 (05) :715-722

[6]

Schenk H, 1999, MOEMS 99: 3RD INTERNATIONAL CONFERENCE ON MICRO OPTO ELECTRO MECHANICAL SYSTEMS (OPTICAL MEMS), PROCEEDINGS, P3

[7]

SCHENK H, 1999, MICROELECTROMECHANIC, V1, P333

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