Simultaneous Topography and Tomography of Microstructures using Full-field Swept-source Optical Coherence Tomography

被引：0
作者：
Anna, Tulsi [1 ]
Shakher, Chandra [1 ]
Mehta, Dalip Singh [1 ]
机构：
[1] Indian Inst Technol Delhi, Laser Applicat & Holog Lab, Instrument Design Dev Ctr, New Delhi 110016, India
来源：
INTERNATIONAL CONFERENCE ON ADVANCED PHASE MEASUREMENT METHODS IN OPTICS AN IMAGING | 2010年 / 1236卷
关键词：
Interferometry; Fourier transforms; nondestructive; tomography; SPECTRAL-DOMAIN;
D O I：
10.1063/1.3426103
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A full-field swept source optical coherence tomographic (FF-SS-OCT) system has been reported for the simultaneous topography and tomography of the microstructures. Our optical set-up includes a swept-source which is a combination of super-luminescent diode (SLD) and acousto-optic tunable filter (AOTF), a compact Michelson interferometer and an area detector (CCD). Interference fringe signal was recorded by tuning the wavelength in a regular interval and fringe analysis was done by using Fourier-transform technique. By means of computing the inverse Fourier transform of the interference fringe signal both optically sectioned images (amplitude) and phase map of the microstructures were obtained. The present system is completely non-mechanical scanning, highly stable and very cost effective due to which it can be explored for many scientific and engineering applications.
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页码：155 / 160
页数：6
相关论文
共 21 条
  • [1] ANNA T, OPT LAS ENG IN PRESS
  • [2] Simultaneous tomography and topography of silicon integrated circuits using full-field swept-source optical coherence tomography
    Anna, Tulsi
    Shakher, Chandra
    Mehta, Dalip Singh
    [J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2009, 11 (04):
  • [3] [Anonymous], 2003, Optical interferometry
  • [4] Bouma B. E., 2002, Handbook of Optical Coherence Tomography, Patent No. 26406747
  • [5] Sensitivity advantage of swept source and Fourier domain optical coherence tomography
    Choma, MA
    Sarunic, MV
    Yang, CH
    Izatt, JA
    [J]. OPTICS EXPRESS, 2003, 11 (18): : 2183 - 2189
  • [6] Improved signal-to-noise ratio in spectral-domain compared with time-domain optical coherence tomography
    de Boer, JF
    Cense, B
    Park, BH
    Pierce, MC
    Tearney, GJ
    Bouma, BE
    [J]. OPTICS LETTERS, 2003, 28 (21) : 2067 - 2069
  • [7] Fingerprint detection using full-field swept-source optical coherence tomography
    Dubey, Satish Kumar
    Anna, Tulsi
    Shakher, Chandra
    Mehta, Dalip Singh
    [J]. APPLIED PHYSICS LETTERS, 2007, 91 (18)
  • [8] Fercher AF, 2003, REP PROG PHYS, V66, P239, DOI 10.2184/lsj.31.635
  • [9] Quantitative phase reconstruction for orthogonal-scanning differential phase-contrast optical coherence tomography
    Heise, Bettina
    Stifter, David
    [J]. OPTICS LETTERS, 2009, 34 (09) : 1306 - 1308
  • [10] OPTICAL COHERENCE TOMOGRAPHY
    HUANG, D
    SWANSON, EA
    LIN, CP
    SCHUMAN, JS
    STINSON, WG
    CHANG, W
    HEE, MR
    FLOTTE, T
    GREGORY, K
    PULIAFITO, CA
    FUJIMOTO, JG
    [J]. SCIENCE, 1991, 254 (5035) : 1178 - 1181
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