Micro-Hall devices: performance, technologies and applications

被引:115
作者
Boero, G [1 ]
Demierre, M [1 ]
Besse, PA [1 ]
Popovic, RS [1 ]
机构
[1] Swiss Fed Inst Technol, CH-1015 Lausanne, Switzerland
关键词
micro-Hall devices; scanning hall probe microscopy;
D O I
10.1016/S0924-4247(03)00192-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this review paper, we summarize the performance (in particular the magnetic field resolution), micro-fabrication technologies and applications of micrometer sized Hall effect devices. Additionally, our activities in this domain are briefly described. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:314 / 320
页数:7
相关论文
共 76 条
[61]  
SUGIYAMA Y, 1985, SENSOR ACTUATOR, V8, P29, DOI 10.1016/0250-6874(85)80022-6
[62]   HIGHLY SENSITIVE SPLIT-CONTACT MAGNETORESISTOR WITH ALAS/GAAS SUPERLATTICE STRUCTURES [J].
SUGIYAMA, Y ;
SOGA, H ;
TACANO, M ;
BALTES, HP .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (09) :1639-1643
[63]   TEMPERATURE-DEPENDENCE OF AN INGAAS-2DEG HALL DEVICE WITH LARGE MAGNETIC SENSITIVITY [J].
SUGIYAMA, Y .
SENSORS AND ACTUATORS A-PHYSICAL, 1994, 40 (02) :135-140
[64]   RECENT PROGRESS ON MAGNETIC SENSORS WITH NANOSTRUCTURES AND APPLICATIONS [J].
SUGIYAMA, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (03) :1075-1083
[65]  
Sugiyama Y., 1995, P TRANSD 95 EUR 9 ST, P225
[66]   Measurement of the stray field emanating from magnetic force microscope tips by Hall effect microsensors [J].
Thiaville, A ;
Belliard, L ;
Majer, D ;
Zeldov, E ;
Miltat, J .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (07) :3182-3191
[67]   SPATIAL RESOLUTION AND SENSITIVITY OF MAGNETIC SUSCEPTIBILITY IMAGING [J].
Thomas, I. M. ;
Ma, Y. P. ;
Tan, S. ;
Wikswo, J. P., Jr. .
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1993, 3 (01) :1937-1940
[68]   A method for the calibration of magnetic force microscopy tips [J].
van Schendel, PJA ;
Hug, HJ ;
Stiefel, B ;
Martin, S ;
Güntherodt, HJ .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (01) :435-445
[69]   Micron-sized Hall probes on a Si/SiGe heterostructure as a tool to study vortex dynamics in high-temperature superconducting crystals [J].
van Veen, RG ;
Verbruggen, AH ;
van der Drift, E ;
Radelaar, S ;
Anders, S ;
Jaeger, HM .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (03) :1767-1770
[70]  
VONKLITZING K, 1980, PHYS REV LETT, V45, P494, DOI 10.1103/PhysRevLett.45.494