Micro-Hall devices: performance, technologies and applications

被引：115

作者：

Boero, G ^{[1
]}

Demierre, M ^{[1
]}

Besse, PA ^{[1
]}

Popovic, RS ^{[1
]}

机构：

[1] Swiss Fed Inst Technol, CH-1015 Lausanne, Switzerland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2003年 / 106卷 / 1-3期

关键词：

micro-Hall devices; scanning hall probe microscopy;

D O I：

10.1016/S0924-4247(03)00192-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this review paper, we summarize the performance (in particular the magnetic field resolution), micro-fabrication technologies and applications of micrometer sized Hall effect devices. Additionally, our activities in this domain are briefly described. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：314 / 320

页数：7

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