Micro-Hall devices: performance, technologies and applications

被引：111
|
作者：
Boero, G [1 ]
Demierre, M [1 ]
Besse, PA [1 ]
Popovic, RS [1 ]
机构：
[1] Swiss Fed Inst Technol, CH-1015 Lausanne, Switzerland
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2003年 / 106卷 / 1-3期
关键词：
micro-Hall devices; scanning hall probe microscopy;
D O I：
10.1016/S0924-4247(03)00192-4
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this review paper, we summarize the performance (in particular the magnetic field resolution), micro-fabrication technologies and applications of micrometer sized Hall effect devices. Additionally, our activities in this domain are briefly described. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码：314 / 320
页数：7
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