共 22 条
[4]
CHIANG CK, 2000, MRS S P, V628
[5]
V-shaped micromechanical tunable capacitors for RF applications
[J].
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,
2005, 12 (1-2)
:15-20
[6]
Laser micromachining of nanocomposite-based flexible embedded capacitors
[J].
57TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE, 2007 PROCEEDINGS,
2007,
:435-+
[8]
Imanaka Y, 2002, FUJITSU SCI TECH J, V38, P22