Multi-channel AlGaN/GaN Schottky barrier diodes with a half through-hole

被引：9

作者：

Liu, Yuebo ^{[1
]}

Yao, Wanqing ^{[1
]}

Liu, Honghui ^{[1
]}

Yang, Longkun ^{[1
]}

Liu, Shangfeng ^{[3
,4
]}

Yang, Liuyun ^{[3
,4
]}

Wang, Fengge ^{[1
]}

Ren, Yuan ^{[1
]}

Shen, Junyu ^{[1
]}

Zhang, Minjie ^{[1
]}

Wu, Zhisheng ^{[1
,2
]}

Liu, Yang ^{[1
,2
]}

Wang, Qi ^{[5
]}

Wang, Xinqiang ^{[3
,4
]}

Zhang, Baijun ^{[1
,2
]}

机构：

[1] Sun Yat Sen Univ, Sch Elect & Informat Technol, Guangzhou 510006, Peoples R China

[2] Sun Yat Sen Univ, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Peoples R China

[3] Peking Univ, Sch Phys, State Key Lab Mesoscop Phys, Beijing 100871, Peoples R China

[4] Peking Univ, Sch Phys, Frontiers Sci Ctr Nanooptoelect, Beijing 100871, Peoples R China

[5] Peking Univ, Dongguan Inst Optoelect, Dongguan 523808, Peoples R China

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2021年 / 133卷

关键词：

Multi-channel; AlGaN; GaN SBDs; 2DEG; Cutoff frequency; MILLIMETER-WAVE; GAN; FREQUENCY; MICROWAVE; CIRCUITS;

D O I：

10.1016/j.mssp.2021.105934

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The cutoff frequency of Schottky barrier diode (SBD) depends on its junction capacitance and series resistance. The two-dimensional electron gas (2DEG) at AlGaN/GaN interface has high carrier mobility and carrier concentration. However, AlGaN/GaN heterostructure SBD usually shows a high series resistance because of the thin 2DEG channel. In this work, multiple AlGaN/GaN heterojunctions are vertically stacked for forming multiple parallel 2DEG channels to reduce the series resistance. Multi-channel AlGaN/GaN-based air-bridge structure planar SBDs with a half through-hole are demonstrated. The series resistance of quintuple-channel SBD is only 39.5% of the single-channel SBD's. Moreover, a low capacitance is obtained by the Schottky electrode with a half through-hole structure. The low series resistance and the low capacitance contribute to a 16 GHz cutoff frequency in millimeter-wave band.

引用

页数：7

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