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- [27] Inductively coupled plasma etching of HgCdTe Journal of Electronic Materials, 2003, 32 : 816 - 820
- [28] Controlling VUV photon fluxes in low-pressure inductively coupled plasmas PLASMA SOURCES SCIENCE & TECHNOLOGY, 2015, 24 (03):
- [29] Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure APPLIED SCIENCE AND CONVERGENCE TECHNOLOGY, 2020, 29 (06): : 157 - 161
- [30] Supercritical CO2 sterilization under low temperature and pressure conditions JOURNAL OF SUPERCRITICAL FLUIDS, 2023, 203