[1] Ningbo Univ, Sch Phys Sci & Technol, Dept Microelect Sci & Engn, Ningbo 315211, Zhejiang, Peoples R China
[2] Univ Chinese Acad Sci, Inst Microelect, Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China
[3] Hubei JiuFengShan Lab, Future Sci & Technol City, Wuhan 420000, Hubei, Peoples R China
[4] Zhengzhou Univ, Sch Phys & Microelect, Key Lab Mat Phys, Minist Educ, Zhengzhou 450052, Peoples R China
[5] Qufu Normal Univ, Sch Chem & Chem Engn, Qufu 273165, Peoples R China