Cation stoichiometry optimization of SrTiO3 (110) thin films with atomic precision in homogeneous molecular beam epitaxy

被引：26

作者：

Wang, Zhiming ^{[1
]}

Feng, Jiagui

Yang, Yang

Yao, Yuan

Gu, Lin

Yang, Fang

Guo, Qinlin

Guo, Jiandong

机构：

[1] Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China

来源：

APPLIED PHYSICS LETTERS | 2012年 / 100卷 / 05期

关键词：

molecular beam epitaxial growth; reflection high energy electron diffraction; stoichiometry; strontium compounds; surface reconstruction; thin films; OXIDE; SUPERLATTICES; POLARIZATION; SURFACE; GROWTH;

D O I：

10.1063/1.3681796

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We study the evolution of surface reconstructions on SrTiO3 (110) determined by cation concentration ratio and find it detectable by high energy electron diffraction (RHEED) even at high temperature up to 800 degrees C. The evaporation rate of Sr and Ti sources can be calibrated precisely by monitoring RHEED patterns in situ and in real time during the extended homogeneous oxide molecule beam epitaxy growth of SrTiO3 (110) film. High quality film is obtained with deviation of cation stoichiometry less than 0.5%. (C) 2012 American Institute of Physics. [doi: 10.1063/1.3681796]

引用

页数：3

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