Design and analysis of resonant based gas sensor

被引：0

作者：

Uma, G. ^{[1
]}

Umapathy, M. ^{[1
]}

Vidhya, L. Baby ^{[1
]}

Maya, M. ^{[1
]}

Sophia, T. ^{[1
]}

Tamilarasi, K. ^{[1
]}

机构：

[1] Natl Inst Technol, Dept Instrumentat & Control Engn, Tiruchirappalli 620015, India

来源：

2008 IEEE SENSORS APPLICATIONS SYMPOSIUM | 2008年

关键词：

Coventorware; piezoelectric; resonant sensor;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents modeling and simulation of micro cantilever based resonant sensor which uses piezoelectric excitation Motion direction and detection Length and width analysis is carried out for maximum displacement at resonance. The proposed design is tested for mass sensitiveness, with conditioning electronics using Coventorware.

引用

页码：119 / 121

页数：3

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